cathode sputtering



  • In a vacuum tube, the emission of particles from a cathode which is disintegrating as a consequence of bombardment by high-energy ions. Also called sputtering (4).
  • The use of cathode sputtering (1) to deposit a thin film of a metal onto a surface such as glass, metal, or plastic. Also called sputtering (5).
  • synonymcathodic sputtering