energy dispersive spectroscopy
- A technique which generates X-ray spectrums of samples which are bombarded by high-energy electron beams. Each element in the sample produces characteristic X-rays, which can be used for identification. The relative intensities of the X-ray peaks determine the relative concentrations of the component elements. Energy dispersive spectroscopy is usually used in conjunction with scanning electron microscopy, and provides high sensitivity for detection of elements whose atomic number is 6 or higher. Below this number, the detected electrons are likelier to be due to the Auger effect. Its abbreviation is EDS.