- The controlled and oriented growth of a thin single-crystal layer upon the surface of another single crystal, with the deposited layer having the same crystalline orientation as its substrate. The grown crystal and the substrate may or may not be the same single crystal. This method is used extensively in the preparation of semiconductor materials. common techniques include molecular beam epitaxy, vapor-phase epitaxy, and liquid-phase epitaxy. Also called epitaxial growth, epitaxial growth process, or epitaxial process.
- synonymepitaxial growth
- synonymepitaxial growth process
- synonymepitaxial process