- minute machines, whose sizes are usually in the micrometer or nanometer range. Such machines combine electrical and mechanical elements, and may be built, for instance, via photolithography. An example is a miniature accelerometer utilized to trigger air bags in cars. Its acronym is MEMS. Also spelled microelectromechanical systems. Also called microelectromechanical machines, or microelectromechanical devices.
- synonymmicroelectromechanical machines