Rutherford backscattering spectrometry



  • An analytical technique in which a high-energy beam of ions, such as He+2, is directed at a sample, with a detector positioned so as to collect particles which are scattered back at or close to 180°. The energies of the collected ions are analyzed to provide extremely detailed information on the composition, structure, thickness, and flaws of samples, in addition to the presence and distribution of any impurities. Its abbreviation is RBS. Also called Rutherford backscattering spectroscopy, or rutherford backscattering (2).
  • acronymRBS
  • synonymRutherford backscattering spectroscopy