secondary-ion mass spectroscopy

Definitions

Electronics

  • A spectroscopic technique in which an ion beam is utilized to sputter ions off the surfaces of samples. These secondary ions produced are then accelerated into a mass spectrometer for separation according to their mass-to-charge ratio. Used, for instance, to detect the elemental composition of the surfaces of geologic samples. Its acronym is SIMS. Also called ion micro-probe.
  • acronymSIMS
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