X-ray lithography

Definitions

Electronics

  • A lithographic technique in which X-rays are utilized to expose the resist, as opposed, for instance, to light or an electron beam. The short wavelengths minimize diffraction and provide for very high resolution, which can be in the nanometer range. The source of X-rays may be a synchrotron, and the mask is usually made of gold. Its abbreviation is XRL.
  • acronymXRL
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